Capacitive acceleration sensor

Details Capacitive acceleration sensor Capacitive acceleration sensor

2005-09-06

2005-09-06

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C361S280000

Reexamination Certificate

active

06938485

ABSTRACT:
The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode (4) and a stationary electrode (5), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

REFERENCES:
patent: 5367429 (1994-11-01), Tsuchitani et al.
patent: 5644455 (1997-07-01), Schultz
patent: 5939171 (1999-08-01), Biebl
patent: 6318174 (2001-11-01), Schmiesing et al.
patent: 6404028 (2002-06-01), Hetrick et al.
patent: 6-213924 (1994-08-01), None
Walter Rydman “Movement of Deuterium in Diamond Foils” Pro Gradu Study, University of Helsinki, Published Dec. 2001; pp. 1-50.

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