4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Joseph William Wiseman

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Determining endpoint in etching processes using principal...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Determining endpoint in etching processes using principal...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Determining endpoint in etching processes using real-time...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Method and system for run-to-run control

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
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Method for manufacturing a semiconductor component

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Profile ID: LFUS-PAI-P-2115797

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