Method and system for run-to-run control

Details Method and system for run-to-run control Method and system for run-to-run control

2006-10-24

2006-10-24

Tsai, Carol S. W. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Chemical analysis

C702S127000, C702S182000, C702S189000, C438S005000, C438S010000, C438S017000, C219S490000, C700S019000, C700S028000, C700S032000

Reexamination Certificate

active

07127358

ABSTRACT:
A method and system of controlling a process from run-to-run for semiconductor manufacturing. The method of control utilizes a process model to establish a relationship between process control input data and process control output data. The method of control involves minimizing the difference between target process control output data and process control output data predicted by applying the process model to the new process control input data.

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