Etching a substrate: processes
Gas phase etching of substrate
Etching a multiple layered substrate where the etching...
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Enhancement of silicon oxide etch rate and nitride...
Enhancement of silicon oxide etch rate and substrate...
Highly selective oxide etch process using hexafluorobutadiene
Oxide etch process using hexafluorobutadiene and related...
Self aligned contact etch using difluoromethane and trifluoromet
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