4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jong Goo Jung

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CMP slurry compositions for oxide films and methods for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for detecting end-point of chemical mechanical...

Semiconductor device manufacturing: process – Chemical etching
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Method for forming capacitor of semiconductor device

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Method for manufacturing a semiconductor device capable of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having junction gate
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Method for manufacturing device isolation film of...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Profile ID: LFUS-PAI-P-2719648

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