4. Coating apparatus
  5. With means to centrifuge work

John S. Molebash

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Methods for exhausting a wafer coating apparatus

Coating processes – Centrifugal force utilized
Patent

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Notch finder and combination wafer transfer machine

Material or article handling – Device for emptying portable receptacle – With jarring means
Patent

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Spin coating bowl exhaust system

Coating apparatus – With means to centrifuge work
Patent

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Spin coating bowl exhaust system

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spin coating bowl exhaust system

Coating apparatus – With means to centrifuge work
Patent

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Profile ID: LFUS-PAI-P-463822

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