4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

John R. Behnke

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Method and apparatus for control of critical dimension using...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Method for controlling transistor spacer width

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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METHOD OF FORMING CORE AND PERIPHERY GATES INCLUDING TWO...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Semiconductor device with core and periphery regions

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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System for controlling transistor spacer width

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Profile ID: LFUS-PAI-P-696926

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