Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
Inventor
active
Apparatus for producing an inductive plasma for plasma processes
Electrostatic chuck with reference electrode
Guard ring electrostatic chuck
Helicon plasma processing tool utilizing a ferromagnetic inducti
Ion implantation helicon plasma source with magnetic dipoles
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Profile ID: LFUS-PAI-P-1250905