4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

John G. Harpold

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Apparatus for removal of electrical shorts in a sputtering syste

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Method and apparatus for recovery from low impedance condition d

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent

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Method for removal of electrical shorts in a sputtering system

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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System for plasma ignition by fast voltage rise

Electric heating – Metal heating – By arc
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1043549

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