Method and apparatus for recovery from low impedance condition d

Details Method and apparatus for recovery from low impedance condition d Method and apparatus for recovery from low impedance condition d

1989-01-03

1990-06-26

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

20429841, 427 37, 118723, C23C 1432, B05D 306

Patent

active

049369601

ABSTRACT:
Techniques for recovery from a low impedance conditions during cathodic arc or electric vapor thin film processes are disclosed. Sensing of a low impedance condition is achieved followed automatically by active clearing of the cloud to return it to the proper impedance or resistance state. Active clearing is accomplished by a progressive increase in the output of bias voltage supply. Regulation of the bias voltage supply switches between voltage or power modes and a current mode of regulation. Circuitry disclosed is designed to readily modify existing power supplies to achieve the methods discussed and to linearly increase the current output by it.

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