Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1989-01-03
1990-06-26
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
20429841, 427 37, 118723, C23C 1432, B05D 306
Patent
active
049369601
ABSTRACT:
Techniques for recovery from a low impedance conditions during cathodic arc or electric vapor thin film processes are disclosed. Sensing of a low impedance condition is achieved followed automatically by active clearing of the cloud to return it to the proper impedance or resistance state. Active clearing is accomplished by a progressive increase in the output of bias voltage supply. Regulation of the bias voltage supply switches between voltage or power modes and a current mode of regulation. Circuitry disclosed is designed to readily modify existing power supplies to achieve the methods discussed and to linearly increase the current output by it.
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Harpold John G.
Schatz Douglas S.
Siefkes Jerry D.
Advanced Energy Industries Inc.
Santangelo Luke
Weisstuch Aaron
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