4. Cleaning and liquid contact with solids
  5. Apparatus
  6. With movable means to cause fluid motion

John deLarios

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Enhanced wafer cleaning method

Cleaning and liquid contact with solids – Apparatus – Automatic controls
Reexamination Certificate

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Method and apparatus for cooling a resonator of a megasonic...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for cooling a resonator of a megasonic...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Method for post-etch and strip residue removal on coral films

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Including contaminant removal or mitigation
Reexamination Certificate

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Proximity head heating method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With heating or cooling means for apparatus part other than...
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Profile ID: LFUS-PAI-P-2716026

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