4. Coating apparatus
  5. Gas or vapor deposition

Johannes Käppeler

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CVD coating device

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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CVD reactor

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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CVD reactor with RF-heated process chamber

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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CVD reactor with substrate holder which is rotatably driven...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Device and method for the deposition of, in particular,...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2136866

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