4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Electron beam imaging

Jingjun Yang

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Electron beam modification of CVD deposited films, forming...

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Electron beam modification of CVD deposited low dielectric...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate

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Electron beam treatment of siloxane resins

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
Reexamination Certificate

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Integration of low-k polymers into interlevel dielectrics using

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
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Low dielectric constant films with high glass transition...

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
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Profile ID: LFUS-PAI-P-1393335

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