4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jingang Su

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Cleaning contact with successive fluorine and hydrogen plasmas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Reactive plasma etch cleaning of high aspect ratio openings

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Sputtering chamber shield promoting reliable plasma ignition

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Tailoring of a wetting/barrier layer to reduce...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1342077

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