4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Jianmin Qiao

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Apparatus and method for uniformly depositing thin films...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Dual damascene structure and method of making

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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ELECTROSTATIC OR MECHANICAL CHUCK ASSEMBLY CONFERRING...

Electricity: electrical systems and devices – Electric charge generating or conducting means
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High deposition rate recipe for low dielectric constant films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for conditioning a plasma etch chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-1769212

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