4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jen Shu

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Dielectric films with low dielectric constants

Stock material or miscellaneous articles – Composite – Of silicon containing
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Dielectric gap fill process that effectively reduces...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Dielectric gap fill process that effectively reduces...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Method of cleaning and forming a negatively charged...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of using organic material to enhance STI...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Profile ID: LFUS-PAI-P-2209499

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