4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal

Jeffrey S. Pulskamp

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Lateral piezoelectric driven highly tunable...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Lateral piezoelectric microelectromechanical system (MEMS)...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Lateral piezoelectric microelectromechanical system (MEMS)...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Minimizing the effect of 1/ƒ noise with a MEMS flux...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3023197

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