Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-09-02
2008-09-02
Dougherty, Thomas M. (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S316010, C310S311000
Reexamination Certificate
active
11387078
ABSTRACT:
A microelectromechanical system (MEMS) device comprises a substrate; an anchored end connected to the substrate; a free end comprising an end effector opposite to the anchored end; a spring attached to the end effector; multiple actuation beams; multiple connection beams adapted to connect the multiple actuation beams to one another; and an actuator/sensor comprising a first electrode; a piezoelectric layer over the first electrode; and a set of second electrodes over the piezoelectric layer, wherein the set of second electrodes being defined by a transverse gap therebetween. Each of the multiple actuation beams comprises two sets of the second electrodes. The set of second electrodes comprise an extensional electrode and a contraction electrode. One of the sets of second electrodes is actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane.
REFERENCES:
patent: 6327855 (2001-12-01), Hill et al.
patent: 6501625 (2002-12-01), Boismier et al.
patent: 6650806 (2003-11-01), Rodgers et al.
patent: 6680826 (2004-01-01), Shiraishi et al.
patent: 6748177 (2004-06-01), Upton
patent: 6757124 (2004-06-01), Kelemen
patent: 6760194 (2004-07-01), Shiraishi et al.
patent: 2001/0033121 (2001-10-01), Nguyen
patent: 2003/0127944 (2003-07-01), Clark et al.
Klaasse et al., “Piezoelectric Versus Electrostatic Actuation for a Capacitive RF-MEMS Switch,” Proceedings of Semiconductor Sensor and Actuator Technology (SeSens), Nov. 29, 2002, Veldhoven, the Netherlands, pp. 631-634.
Ervin et al., “Recurve Piezoelectric-Strain-Amplifying Actuator Architecture,” IEEE/ASME Transactions on Mechatronics, vol. 3, No. 4, Dec. 1998, pp. 293-301.
Dougherty Thomas M.
Gordon Bryan P
Spevack A. David
Stolarum Edward L.
The United States of America as represented by the Secretary of
LandOfFree
Lateral piezoelectric microelectromechanical system (MEMS)... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lateral piezoelectric microelectromechanical system (MEMS)..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lateral piezoelectric microelectromechanical system (MEMS)... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3914707