Lateral piezoelectric driven highly tunable...

Details Lateral piezoelectric driven highly tunable... Lateral piezoelectric driven highly tunable...

2007-11-08

2009-02-03

Dougherty, Thomas M (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S316020

Reexamination Certificate

active

07486002

ABSTRACT:
A MEMS device comprising a substrate; an anchored end connected to the substrate; and an actuator comprising a first electrode; a piezoelectric layer over the first electrode; and multiple sets of second electrodes over the piezoelectric layer, wherein each of the sets of second electrodes being defined by a transverse gap there between, and wherein one of the sets of second electrodes are actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane. The device further comprises an end effector opposite to the anchored end and connected to the actuator; a ferromagnetic core support structure connected to the end effector; a movable ferromagnetic inductor core on top of the ferromagnetic core support structure; and a MEMS inductor coiled around the ferromagnetic core support structure and the movable ferromagnetic inductor core.

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