4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Jeffrey Marks

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Apparatus and method for distribution of slurry in a chemical me

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Patent

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Apparatus and method for distribution of slurry in a...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Electrostatic chuck for high power plasma processing

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Electrostatic chuck usable in high density plasma

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck usable in high density plasma

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Profile ID: LFUS-PAI-P-316895

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