Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
Representative
active
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Freestanding multilayer IC wiring structure
Metal deposition process for metal lines over topography
Method of patterning sidewalls of a trench in integrated circuit
Methods and apparatus for filling high aspect ratio structures w
Vapor phase etching of oxide masked by resist or masking materia
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