4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Base includes an inorganic compound containing silicon or...

Jason Klaus

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Metal gate structure and method of manufacturing same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of growing films on substrates at room temperatures using

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Patent

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Selective deposition of amorphous silicon films on metal gates

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1806828

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