4. Semiconductor device manufacturing: process
  5. With measuring or testing

Jason A. Grover

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Creating a process recipe based on a desired result

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Determining a possible cause of a fault in a semiconductor...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate

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Method and apparatus for controlling a multi-chamber...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and apparatus for impasse detection and resolution

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and apparatus for measuring defects

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2670494

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