Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-09-30
2009-11-17
Shechtman, Sean P (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S011000, C700S028000, C700S099000, C700S110000, C700S114000, C700S121000
Reexamination Certificate
active
07620470
ABSTRACT:
A method, apparatus and a system, for provided for performing an automated process flow adjustment. A semiconductor wafer is processed based upon a routing plan and a predetermined schedule. A fault detection relating to the processing of the semiconductor wafer is performed. Dynamically modifying the predetermined routing plan or the predetermined schedule based upon the fault detection. A predetermined process material delivery plan is dynamically modified based upon the modifying of the routing plan or modifying of the predetermined schedule.
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Grover Jason A.
Hickey Susan
Nicksic Cabe W.
Stewart Edward C.
Advanced Micro Devices , Inc.
Shechtman Sean P
Williams Morgan & Amerson P.C.
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