4. Optics: measuring and testing
  5. By polarized light examination
  6. Of surface reflection

Jang-Shiang Tsai

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Low oxygen content photoresist stripping process for low...

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Reexamination Certificate

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Measuring low dielectric constant film properties during...

Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate

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Method for photoresist stripping and treatment of low-k...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2429158

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