Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2008-07-15
2008-07-15
Chowdhury, Tarifur R (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S445000, C356S326000
Reexamination Certificate
active
07400401
ABSTRACT:
A method and system for determining the dielectric constant of a low-k dielectric film on a production substrate include measuring the electronic component of the dielectric constant using an ellipsometer, measuring the ionic component of the dielectric constant using an IR spectrometer, measuring the overall dielectric constant using a microwave spectrometer and deriving the dipolar component of the dielectric constant. The measurements and determination are non-contact and may be carried out on a production device that is further processed following the measurements.
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Hsu Ju-Wang
Hsu Peng-Fu
Perng Baw-Ching
Shieh Jyu-Horng
Su Yi-Nien
Chowdhury Tarifur R
Duane Morris LLP
Hansen Jonathan M
Taiwan Semiconductor Manufacturing Co. Ltd.
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