4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Janet M. Flanner

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Apparatus for reducing process drift in inductive coupled plasma

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Apparatus for reducing process drift in inductive coupled...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Convertible hot edge ring to improve low-K dielectric etch

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Convertible hot edge ring to improve low-K dielectric etch

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Electronically diagnosing a component in a process line...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-697063

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