4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Altering etchability of substrate region by compositional or...

Janet Hopkins

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Method and apparatus for etching a substrate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of surface treatment of semiconductor substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of surface treatment of semiconductor substrates

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
Patent

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Profile ID: LFUS-PAI-P-1962599

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