Cleaning of chamber components

Details Cleaning of chamber components Cleaning of chamber components

2007-09-04

2007-09-04

Barr, Michael (Department: 1746)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S019000, C134S022100, C134S026000, C134S028000, C134S034000, C134S037000

Reexamination Certificate

active

10777866

ABSTRACT:
In a method of cleaning a surface of a substrate processing chamber component to remove process deposits, the component surface is cooled to a temperature below about −40° C. to fracture the process deposits on the surface. The surface can be cooled by immersing the surface in a low temperature fluid, such as liquid nitrogen. In another version, the component surface is heated to fracture and delaminate the deposits, and optionally, subsequently rapidly cooled to form more fractures. The component surface cleaning can also be performed by bead blasting followed by a chemical cleaning step.

REFERENCES:
patent: 3934379 (1976-01-01), Braton et al.
patent: 4627197 (1986-12-01), Klee et al.
patent: 5391275 (1995-02-01), Mintz
patent: 5401319 (1995-03-01), Banholzer et al.
patent: 5474649 (1995-12-01), Kava et al.
patent: 5555902 (1996-09-01), Menon
patent: 5908510 (1999-06-01), McCullough et al.
patent: 5910338 (1999-06-01), Donde et al.
patent: 5916151 (1999-06-01), Richardson et al.
patent: 5954887 (1999-09-01), Hatano
patent: 6082373 (2000-07-01), Sakurai et al.
patent: 6214130 (2001-04-01), Sasaki
patent: 6408860 (2002-06-01), Chin et al.
patent: 2002/0086118 (2002-07-01), Chang et al.
patent: 2003/0173526 (2003-09-01), Popiolkowski et al.
patent: 2003/0188766 (2003-10-01), Banerjee et al.
patent: 2004/0056211 (2004-03-01), Popiolkowski et al.
patent: 0 633 433 (1995-01-01), None
patent: 57010370 (1982-01-01), None
patent: 63155729 (1988-06-01), None
patent: 02257613 (1990-10-01), None
patent: 03190131 (1991-08-01), None
patent: 07066119 (1998-03-01), None
patent: 2001-274135 (2001-10-01), None
patent: WO-03086668 (2003-10-01), None
U.S. Patent Application title, “Fabricating and Cleaning Chamber Components Having Textured Surfaces,” filed Sep. 2, 2003, U.S. Appl. No. 10/653,713; West et al.

Affiliated with

Also associated with

Rating

Cleaning of chamber components does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cleaning of chamber components, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cleaning of chamber components will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3795080