4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

James R. B. Elmer

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Integrated circuit process monitoring and metrology system

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Integrated circuit process monitoring and metrology system

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Multi pattern reticle

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Photolithography overlay control

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Process independent alignment marks

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
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Profile ID: LFUS-PAI-P-2385895

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