4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Radiation sensitive composition or product or process of making

James E. Lamb, III

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Anti-reflective coating compositions for use with low k...

Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate

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Anti-reflective coating of polymer with epoxide rings...

Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate

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Anti-reflective coating of polymer with epoxide rings...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Reexamination Certificate

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Base-soluble polyimide release layers for use in microlithograph

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From carboxylic acid or derivative thereof
Patent

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Contact planarization materials that generate no volatile...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Utilizing reflow
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Profile ID: LFUS-PAI-P-164010

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