Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate
2005-05-17
2005-05-17
Sellers, Robert (Department: 1712)
Coating processes
With post-treatment of coating or coating material
Heating or drying
C427S385500, C427S386000, C427S393500, C525S203000, C525S204000, C525S207000, C525S208000, C525S326700, C525S326800, C525S327300, C525S327400
Reexamination Certificate
active
06893684
ABSTRACT:
Anti-reflective compositions and methods of using those compositions with low dielectric constant materials are provided. In one embodiment, the compositions include polymers comprising recurring monomers having unreacted ring members. In another embodiment, the polymers further comprise recurring monomers comprising ring members reacted with a light attenuating compound so as to open the ring. The compositions can be applied to dielectric layers so as to minimize or prevent reflection during the dual damascene process while simultaneously blocking via or photoresist poisoning which commonly occurs when organic anti-reflective coatings are applied to low dielectric constant layers.
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Kal'yan et al., Chemical abstracts accession No. 24 (Chiimg id="CUSTOM-CHARACTER-00001" he="2.46mm" wi="1.02mm" file="US06893684-20050517-P00701.TIF" alt="custom character" img-content="character" img-format="tif" ?in{hacek over (a)} 1971) with Certificate of Accuracy and Translation Certificate (8 pages total).
Flaim Tony D.
Lamb, III James E.
Puligadda Rama
Brewer Science Inc.
Hovey & Williams, LLP
Sellers Robert
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