4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

James A. Seirmarco

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Electrostatic chuck with diamond coating

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Inductively coupled plasma sputter chamber with conductive mater

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Ion implantation apparatus for controlling the surface potential

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-874482

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