4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Having liquid and vapor etching steps

Jae-Woong Kim

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Apparatus for manufacturing a semiconductor device

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means for passing discrete workpiece through plural...
Reexamination Certificate

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Semiconductor device having a contact window and fabrication...

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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Semiconductor device having a contact window including a...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Semiconductor device having a contact window including a...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2684030

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