4. Coating apparatus
  5. Gas or vapor deposition

Jae-Hyuck An

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Chemical vapor deposition apparatus having a gas diffusing nozzl

Coating apparatus – Gas or vapor deposition
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Furnace of apparatus for manufacturing a semiconductor...

Metallurgical apparatus – Means treating solid metal – By contact with gas
Reexamination Certificate

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Method of and apparatus for performing sequential processes...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of and apparatus for performing sequential processes...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means for passing discrete workpiece through plural...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1823149

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