4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Jacobus Burghoorn

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Alignment systems and methods for lithographic systems

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Alignment systems and methods for lithographic systems

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate

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Interferometric alignment system for use in vacuum-based...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Interferometric alignment system for use in vacuum-based...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2569674

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