Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-05-01
2009-08-18
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000
Reexamination Certificate
active
07576834
ABSTRACT:
A lithographic apparatus is provided. The lithographic apparatus includes a radiation source configured to provide radiation, an array of optical light engines, and a substrate table that supports a substrate. Each of the optical light engines includes an array of individually controllable elements arranged and constructed to receive and to pattern the radiation and projection optics configured to receive the patterned radiation and to project the patterned radiation onto the substrate. The substrate table is arranged and constructed to move relative to the array of optical light engines during exposure of the substrate to the patterned radiation.
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Burghoorn Jacobus
de Jager Pieter Willem Herman
George Richard Alexander
Gui Cheng-Qun
Van Leeuwen Robbert Edgar
ASML Netherlands B.V.
Mathews Alan A
Sterne Kessler Goldstein & Fox P.L.L.C.
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