Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-04-05
2005-04-05
Adams, Russell (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S030000, C356S399000
Reexamination Certificate
active
06876436
ABSTRACT:
In a lithographic apparatus having a movable object table in vacuum, an interferometer-based alignment system for detecting the position of that object table has a passive part in vacuum and an active part outside the vacuum chamber. The active part contains the beam generator, e.g. a laser, and the electronic detectors whilst the passive part contains the illumination and imaging optics. The two parts are coupled by optical fibers. The interferometer may make use of different diffraction orders from measurement and reference gratings and the order separation may be included in the passive part.
REFERENCES:
patent: 4011403 (1977-03-01), Epstein et al.
patent: 4326805 (1982-04-01), Feldman et al.
patent: 4629313 (1986-12-01), Tanimoto
patent: 4749278 (1988-06-01), van der Werf
patent: 4778275 (1988-10-01), Van Den Brink et al.
patent: 5877505 (1999-03-01), Fujino
patent: 5963616 (1999-10-01), Silfvast et al.
patent: 6018413 (2000-01-01), Oka
patent: 6160622 (2000-12-01), Dirksen et al.
patent: 6268904 (2001-07-01), Mori et al.
patent: 6281966 (2001-08-01), Kenmoku
patent: 6304319 (2001-10-01), Mizutani
patent: 6411368 (2002-06-01), Matsumoto et al.
Adams Russell
ASML Netherlands B.V.
Esplin D. Ben
Pillsbury & Winthrop LLP
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