4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Recycling, regenerating, or rejunevating etchant

Ismail Kashkoush

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Chemical concentration control device

Fluid handling – Processes – With control of flow by a condition or characteristic of a...
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Cleaning and drying method and apparatus

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Low profile wafer carrier

Cleaning and liquid contact with solids – Apparatus – Combined or convertible
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Membrane dryer

Drying and gas or vapor contact with solids – Apparatus – With automatic control
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Membrane dryer

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
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Profile ID: LFUS-PAI-P-2298728

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