Low profile wafer carrier

Details Low profile wafer carrier Low profile wafer carrier

2005-03-29

2005-03-29

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

Combined or convertible

C134S135000, C134S201000, C134S902000, C211S041180

Reexamination Certificate

active

06871657

ABSTRACT:
An apparatus for transporting semiconductor wafers between processing steps that can also be used to support the wafers during various processing steps. The apparatus minimizes the obstruction of fluid flow in the process tank, reduces the amount of devices that will fail due to edge exclusion, and reduces processing times. In one embodiment, the apparatus is a wafer carrier comprising a wire frame having three load supporting members, the load supporting members having a plurality of wafer engaging elements adapted to support a plurality of wafers.

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