Sample inspection apparatus

Details Sample inspection apparatus Sample inspection apparatus

2011-08-02

2011-08-02

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S310000

Reexamination Certificate

active

07989766

ABSTRACT:
A sample inspection apparatus in which a fault in a semiconductor sample can be measured and analyzed efficiently. A plurality of probes are brought into contact with the sample. The sample is irradiated with an electron beam while a current flowing through the probes is measured. Signals from at least two probes are supplied to an image processing unit so as to form an absorbed electron current image. A difference between images obtained in accordance with a temperature change of the sample is obtained. A faulty point is identified from the difference between the images.

REFERENCES:
patent: 6970004 (2005-11-01), Ishitani et al.
patent: 7388365 (2008-06-01), Nokuo et al.
patent: 2002-368049 (2002-12-01), None
patent: 2003-86913 (2003-03-01), None
patent: 2008-211111 (2008-09-01), None

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