Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2005-11-29
2005-11-29
Nguyen, Vincent Q. (Department: 2858)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S501000, C324S758010, C250S208100, C250S548000
Reexamination Certificate
active
06970004
ABSTRACT:
Disconnection defects, short-circuit defects and the like in wiring patterns of submicron sizes within TEGs (a square of 1 to 2.5 mm for each) numerously arranged in a large chip (a square of 20 to 25 mm) can be inspected with respect to all the TEGs, with good operability, high reliability and high efficiency. A conductor probe for applying voltage to the wiring patterns by mechanical contact is composed of synchronous type conductor probe that synchronizes with movement of a sample stage (16), and fixed type conductor probe means (21) that is relatively fixed to an FIB generator (10). Positions of probe tips are superimposed to an SIM image and displayed on a display unit (19).
REFERENCES:
patent: 4267507 (1981-05-01), Guerpont
patent: 4740698 (1988-04-01), Tamura et al.
patent: 5469064 (1995-11-01), Kerschner et al.
patent: 5844416 (1998-12-01), Campbell et al.
patent: 5850148 (1998-12-01), Nam
patent: 6331712 (2001-12-01), Sugiyama et al.
patent: 6452174 (2002-09-01), Hirose et al.
patent: 0 495 262 (1992-07-01), None
patent: 0 619 551 (1994-10-01), None
patent: 0 853 243 (1998-07-01), None
patent: 0 892 275 (1999-01-01), None
patent: 55-9407 (1980-01-01), None
patent: 1-143983 (1989-06-01), None
patent: 2-102467 (1990-04-01), None
patent: 4-47656 (1992-02-01), None
patent: 4-74437 (1992-06-01), None
patent: 4-343245 (1992-11-01), None
patent: 6-66029 (1994-09-01), None
patent: 9-45739 (1997-02-01), None
patent: 9-326425 (1997-12-01), None
patent: 10-313027 (1998-11-01), None
patent: 11-121559 (1999-04-01), None
patent: 11-344538 (1999-12-01), None
Azuma Junzo
Ishitani Tohru
Koike Hidemi
Sekihara Isamu
Sugimoto Aritoshi
Dickstein , Shapiro, Morin & Oshinsky, LLP
Hitachi , Ltd.
Hitachi ULSI Systems Co. Ltd.
Nguyen Vincent Q.
Teresinski John
LandOfFree
Apparatus for inspecting defects of devices and method of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus for inspecting defects of devices and method of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for inspecting defects of devices and method of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3516004