4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Ichirota Nagahama

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Defect inspection apparatus, program, and manufacturing...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Detecting apparatus and device manufacturing method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Detecting apparatus and device manufacturing method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Electron beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Electron beam apparatus and an aberration correction optical...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2321692

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