Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-07-11
2006-07-11
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000
Reexamination Certificate
active
07075072
ABSTRACT:
A detecting apparatus for detecting a fine geometry on a surface of a sample, wherein an irradiation beam is irradiated against the sample placed in a different environment different from an atmosphere and a secondary radiation emanated from the sample is detected by a sensor, and wherein the sensor is disposed at an inside of the different environment, a processing device to process detection signals from the sensor is disposed at an outside of the different environment, and a transmission means transmits detection signals from the sensor to the processing device.
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Hatakeyama Masahiro
Murakami Takeshi
Nagahama Ichirota
Noji Nobuharu
Satake Tohru
Ebara Corporation
Johnston Phillip A.
Kabushiki Kaisha Toshiba
Wells Nikita
Westerman, Hattori, Daniels & Adrian , LLP.
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