Organic compounds -- part of the class 532-570 series
Organic compounds
Heterocyclic carbon compounds containing a hetero ring...
Inventor
active
2-Substituted phenyl-4,5,6,7-tetrahydro-2H-indazoles
2-substituted phenyl-4,5,6,7-tetrahydro-2H-indazoles, their prod
Chemical amplification type positive resist composition
Chemically amplified positive resist composition
Chemically amplified positive resist composition
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