4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Thermally responsive

IC Mechanics Inc.

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Accelerometer-assisted servo writing for disk drives

Dynamic magnetic information storage or retrieval – Automatic control of a recorder mechanism – Controlling the head
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Encapsulation of MEMS devices using pillar-supported caps

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Thermally responsive
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Manufacture of MEMS structures in sealed cavity using...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromachined assembly with a multi-layer cap defining a cavity

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Thin film MEMS sensors employing electrical sensing and...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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