Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
By reaction with substrate
Inventor
active
CMOS device having different amounts of nitrogen in the NMOS...
Lanthanide series metal implant to control work function of...
Monitoring of nitrided oxide gate dielectrics by...
Nitrogen profile in high-K dielectrics using ultrathin...
Work function adjustment with the implant of lanthanides
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