4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hun-Jan Tao

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Advanced control for plasma process

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Approach to improve line end shortening

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Approach to improve line end shortening including...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Aqueous cleaning composition containing copper-specific...

Semiconductor device manufacturing: process – Cleaning of wafer as interim step
Reexamination Certificate

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Backside contacts for MOS devices

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-321604

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