4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Hsin-Tang Peng

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Dual damascene process which prevents diffusion of metals...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of forming contact hole

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of forming contact plugs

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Monitor method and apparatus for overlay alignment of a stepper

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Patterned mask and a deep trench capacitor formed thereby

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-369060

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