4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hongqing Shan

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Advanced low cost high throughput processing platform

Material or article handling – Apparatus for moving material between zones having different...
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Apparatus and method for controlling plasma uniformity in a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Apparatus for uniformly etching a dielectric layer

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Apparatus for uniformly etching a dielectric layer

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Enhancement of silicon oxide etch rate and nitride...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-2060109

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